Title :
Comparing the Accuracy and Repeatability of On-Wafer Calibration Techniques to 110GHz
Author_Institution :
Cascade Microtech Europe Ltd, 3 Somerville Court Banbury Business Park, Adderbury, Oxfordshire, UK. anthony.lord@cmicro.com
Abstract :
Many methods of making corrected S-Parameters measurements are available for on-wafer devices and circuits. This is a comparative study of calibration techniques, presented as most accurate and repeatable for making on-wafer measurements.
Keywords :
Aerospace industry; Calibration; Circuits; Frequency; Measurement standards; Microwave measurements; NIST; Performance evaluation; Reflection; Software measurement;
Conference_Titel :
Microwave Conference, 1999. 29th European
Conference_Location :
Munich, Germany
DOI :
10.1109/EUMA.1999.338519
