Title :
Densely Packed VCSEL Arrays Tailored for Optical Particle Manipulation
Author :
Kroner, A. ; Rinaldi, F. ; Rösch, R. ; Michalzik, R.
Author_Institution :
Ulm Univ., Ulm
Abstract :
We have fabricated arrays of top-emitting VCSELs with pitches down to 24 mum and an only 2 mum wide gap between the devices. For enhanced single-mode emission, the inverted surface relief technique was applied on some devices. The output facets then contain a shallow, circular etch in their center.
Keywords :
etching; radiation pressure; semiconductor laser arrays; surface emitting lasers; circular etch; densely packed VCSEL arrays; enhanced single mode emission; inverted surface relief technique; optical particle manipulation; output facets; wavelength 2 mum; wavelength 24 mum; Apertures; Biomedical optical imaging; Charge carrier processes; Etching; Optical arrays; Optical devices; Optical surface waves; Scanning electron microscopy; Stimulated emission; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-0931-0
Electronic_ISBN :
978-1-4244-0931-0
DOI :
10.1109/CLEOE-IQEC.2007.4385943
