MEMS sensors for high voltage lines

Author

Moagar-Poladian, Victor ; Moagar-Poladian, Gabriel

Author_Institution

Nat. Inst. for R&D in Microtechnol., Bucharest, Romania

fYear

2013

fDate

16-20 Sept. 2013

Firstpage

358

Lastpage

361

Abstract

The paper presents the application for the first time, to our knowledge, of MEMS devices in the field of high power, high voltage lines. We show how these devices can be used for measuring instantaneous voltage value in real-life industrial conditions. The high voltage MEMS device allows a voltage measurement relative error less than 0,1 % in normal conditions while during a strong earthquake (0,28g soil acceleration - `g´ is the gravitational acceleration) it increases to 6 %. We present simulation results and the experimental realization of the optimized sensor model in polymer by using 3D Rapid Prototyping means.

Keywords

acceleration; earthquakes; microsensors; optimisation; power semiconductor devices; voltage measurement; 3D rapid prototyping; MEMS devices; MEMS sensors; earthquake; gravitational acceleration; high power lines; high voltage lines; instantaneous voltage; optimized sensor model; soil acceleration; voltage measurement relative error; Acceleration; Micromechanical devices; Optical interferometry; Optical sensors; Temperature measurement; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference (ESSDERC), 2013 Proceedings of the European

Conference_Location

Bucharest

Type

conf

DOI

10.1109/ESSDERC.2013.6818892

Filename

6818892