Title :
Open-loop-control of pore formation in semiconductor etching
Author :
Claussen, Jens Christian ; Carstensen, Jurgen ; Christophersen, M. ; Langa, Sergiu ; Foll, Helmut
Author_Institution :
Inst. fur Theor. Phys. & Astrophys., Kiel Univ., Germany
Abstract :
Electrochemical etching of semiconductors gives rise to a wide variety of self-organized structures including fractal structures, regular and branching pores. The current-burst model and the aging concept are considered to describe the dynamical behavior governing the structure formation. Here the suppression of side-branching during pore growth is demonstrated by an open-loop-control method, resulting in pores with oscillating diameter.
Keywords :
anodisation; current fluctuations; dissolving; etching; fractals; passivation; porous semiconductors; aging concept; branching pores; current-burst model; dissolution; electrochemical etching; fractal structures; open-loop-control; oscillating diameter; pore formation; regular pores; self-organized structures; semiconductor etching; side-branching suppression; Doping; Etching; Gallium arsenide; Human computer interaction; Indium phosphide; Lighting; Plasma welding; Temperature control;
Conference_Titel :
Physics and Control, 2003. Proceedings. 2003 International Conference
Print_ISBN :
0-7803-7939-X
DOI :
10.1109/PHYCON.2003.1237020