Coherent atomic beam splitter control for nano-scale atom wave packet lithography

Atomic beam splitter needs for the practical realization of nano-scale lithography by coherent scattering of the atoms. We consider the different types of atomic beam splitters, which could be used for the creation of the space structures with nano-scale period. We concentrate to a few main schemes of an interaction between an atom beam and optical radiation, which can produce a large angle splitting of atom beam into only two main momentum components: multi Bragg scattering an atom wave packet in standing wave; coherent splitting by scattering of an atom wave packet in standing wave with modulated intensity, when the intensity of the standing wave changes harmonically. We discuss also the experimental possibility of an atom selection in internal states for obtaining of space periodical structure with high clearance.