Title :
Comparison of mode-conversion, energy-trapping and lateral acoustic coupling in FBAR and SBAR
Author :
Milsom, R.F. ; Vanhelmont, F. ; Jansman, A.B.M. ; Lobeek, J.-W.
Author_Institution :
Philips Res. Labs., Redhill, UK
Abstract :
2D mode-matching theory is used to explore differences between the two types of thin-film bulk-acoustic wave (BAW) resonator, based on membrane (FBAR) and Bragg reflector (SBAR). Issues of mode-conversion and energy-trapping are explored. Lateral acoustic coupling is addressed in the presentation. The most significant finding is that the SBAR reflector plays a significant part in the reduction of spurious responses close to the fundamental frequency of BAW resonators and filters.
Keywords :
acoustic resonator filters; bulk acoustic wave devices; mode matching; thin film devices; 2D mode-matching theory; BAW filters; BAW resonator; Bragg reflector; FBAR; SBAR reflector; bulk acoustic wave devices; lateral acoustic coupling; thin-film bulk-acoustic wave resonator; Acoustic devices; Bulk acoustic wave devices; Electrodes; Film bulk acoustic resonators; Laboratories; Piezoelectric films; Radio frequency; Resonance; Resonator filters; Thin film devices;
Conference_Titel :
Microwave Symposium Digest, 2005 IEEE MTT-S International
Print_ISBN :
0-7803-8845-3
DOI :
10.1109/MWSYM.2005.1516566
