Title :
In-situ monitoring and control for the growth of highly reproducible VCSEL structures
Author :
Houng, Y.M. ; Tan, M.R.T. ; Liang, B.W. ; Wang, S.Y. ; Mars, D.E.
Author_Institution :
Hewlett-Packard Co., Palo Alto, CA, USA
Abstract :
Summary form only given. This paper reviews the pyrometric interferometry technique, and compares it with other in-situ and ex-situ methods for epitaxial growth monitoring and control. Highly reproducible vertical cavity surface emitting lasers (VCSEL) structures are used as an example to demonstrate the effectiveness of the in-situ monitoring and control technique. The authors use the pyrometric interferometry technique for in-situ monitoring and feedback control of layer thickness to obtain highly reproducible distributed Bragg reflectors (DBR) for 980- and 780-nm vertical cavity surface emitting lasers (VCSEL)
Keywords :
distributed Bragg reflector lasers; laser cavity resonators; light interferometry; pyrometers; semiconductor epitaxial layers; semiconductor growth; semiconductor lasers; 780 nm; 980 nm; distributed Bragg reflectors; epitaxial growth; feedback control; in-situ monitoring; pyrometric interferometry; reproducible VCSEL structures; Distributed Bragg reflectors; Distributed feedback devices; Epitaxial growth; Feedback control; Interferometry; Laser feedback; Monitoring; Optical control; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Indium Phosphide and Related Materials, 1994. Conference Proceedings., Sixth International Conference on
Conference_Location :
Santa Barbara, CA
Print_ISBN :
0-7803-1476-X
DOI :
10.1109/ICIPRM.1994.328308
