Title :
Combined Mechanical and Electrical Analysis of a Microelectromechanical Switch for RF Applications
Author :
De Flaviis, F. ; Coccioli, R.
Author_Institution :
Department of Electrical and Computer Engineering, Engineering Tower Room 416C, Irvine, CA 93697-2625. Phone: (949) 824-5631; fax: (949) 824-2321; email: franco@uci.edu
Abstract :
A combined mechanical and electrical model is used to investigate the non-linear behavior of a high switching rate capacitive microelectromechanical switch for RF and microwave application. The damped spring model is employed to simulate the movement of the switch movable contact, while an ad-hoc solver based on a modified Runge-Kutta method is exploited to solve the electrical circuit at microwave frequency including the effect of the time variable switch capacitance.
Keywords :
Biomembranes; Capacitance; Dielectric substrates; Electrodes; Micromechanical devices; Microwave frequencies; Predictive models; Radio frequency; Springs; Switches;
Conference_Titel :
Microwave Conference, 1999. 29th European
Conference_Location :
Munich, Germany
DOI :
10.1109/EUMA.1999.338484
