Industrial machine monitoring using MEMS technology

The idea of employing microelectromechanical systems (MEMS) technology in prognostics and health management (PHM).This paper focuses on a particular class of MEMS devices known as micromechanical (MEMS) resonators and their application to PHM. This paper illustrates how MEMS resonators can by implemented as building blocks of devices and systems with various functions of potentially great benefit to the field of PHM. In particular, two applications of MEMS resonators that could be potentially of great interest to PHM have been selected to be highlighted herein. These are namely strain sensing (especially usefully for structural health monitoring) and acoustic spectral processing for low power real-time degradation monitoring.