High Q single-mode high-tone bulk acoustic resonator integrated with surface-micromachined FBAR filter

Author

Wei Pang ; Hao Zhang ; Jong Jin Kim ; Hongyu Yu ; Eun Sok Kim

Author_Institution

Dept. of EE-Electrophys., Southern California Univ., Los Angeles, CA, USA

fYear

2005

fDate

12-17 June 2005

Abstract

This paper describes a high-tone bulk acoustic resonator (HBAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a quality factor (Q) of 3,580 at 2.5 GHz with total size (including the contact pads) of 0.8 × 0.4 × 0.4mm³. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.

Keywords

Q-factor; acoustic resonator filters; bulk acoustic wave devices; microwave oscillators; sapphire; voltage-controlled oscillators; 2.5 GHz; FBAR filters; Pierce oscillators; film bulk acoustic resonator filters; high Q acoustic resonator; high-tone bulk acoustic resonator; microwave oscillators; single-mode acoustic resonator; surface micromachining; voltage controlled oscillators; Acoustic waves; Film bulk acoustic resonators; Frequency; Microwave oscillators; Piezoelectric films; Q factor; Resonator filters; Substrates; Surface acoustic waves; Voltage-controlled oscillators;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2005 IEEE MTT-S International

ISSN

01490-645X

Print_ISBN

0-7803-8845-3

Type

conf

DOI

10.1109/MWSYM.2005.1516616

Filename

1516616