• DocumentCode
    2153596
  • Title

    Metallo-organic decomposition derived Sr0.95Ca0.05ZrO3 oxide thin films on Pt/Ti/SiO2/Si substrate

  • Author

    Chen, Changhong ; Weiguang Zhu ; Yu, Ting ; Chen, Xiaofeng ; Lu, Yuekang ; Krishnan, R. Gopal

  • Author_Institution
    Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore
  • fYear
    2002
  • fDate
    11-13 Dec. 2002
  • Firstpage
    169
  • Lastpage
    172
  • Abstract
    Dielectric thin films of strontium zirconate doped with 5 mol% calcium were prepared on Pt/Ti/SiO2/Si substrate by the metallo-organic decomposition (MOD) wet chemical technology followed by annealing at different temperatures in flowing oxygen atmosphere. Those prepared Sr0.95Ca0.05ZrO3 thin films were investigated using differential thermal analysis (DTA) and thermogravimetric analysis (TGA), X-ray diffraction (XRD), UV optical reflection spectroscopic measurement, and sweeping frequency dependence of the dielectric constants and losses to study their structural development, optical band gaps, and dielectric properties. The study is aimed at seeking a possibility for an application in the area of high-K dielectrics.
  • Keywords
    MOCVD; X-ray diffraction; annealing; calcium compounds; dielectric losses; dielectric thin films; differential thermal analysis; infrared spectra; optical constants; optical films; permittivity; strontium compounds; Pt-Ti-SiO2-Si; Pt/Ti/SiO2/Si substrate; Sr0.95Ca0.05ZrO3; UV optical reflection spectroscopic measurement; X-ray diffraction; annealing; calcium; dielectric constants; dielectric losses; dielectric thin films; differential thermal analysis; flowing oxygen atmosphere; high-K dielectrics; metallo-organic decomposition; optical band gaps; oxide thin films; strontium zirconate; structural development; sweeping frequency dependence; thermogravimetric analysis; wet chemical technology; Annealing; Atmosphere; Calcium; Chemical technology; Dielectric loss measurement; Dielectric substrates; Dielectric thin films; Optical films; Strontium; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
  • ISSN
    1097-2137
  • Print_ISBN
    0-7803-7571-8
  • Type

    conf

  • DOI
    10.1109/COMMAD.2002.1237219
  • Filename
    1237219
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2153596