Extraction of broadband error boxes for microprobes and recessed probe launches for measurement of printed circuit board structures

This paper presents results for the error boxes (two-port scattering parameters) of ground-signal-ground (GSG) mini-coaxial probes (microprobes) and recessed probe launches up to 20 GHz. The recessed probe launch uses internal GSG pads for the access of embedded printed circuit board (PCB) structures without the need for signal vias. The error boxes were obtained by using two-tier calibration techniques where the first tier was based on short-open-load-through (SOLT) and the second tier on short-open-load (SOL) or through-reflect-line (TRL) calibration algorithms. Results from different calibration set ups are compared with each other and agree well. The obtained error boxes can be used for deembedding or analysis of the microprobe and probe launch performance.