DocumentCode
2153851
Title
Finite Ground Coplanar Waveguide Shunt MEMS Switches for Switched Line Phase Shifters
Author
Ponchak, George E. ; Simons, Rainee N. ; Scardelletti, Maximilian C. ; Varaljay, Nicholas C.
Author_Institution
NASA Glenn Research Center, 21000 Brookpark Rd., MS 54/5, Cleveland, OH 44135. TEL: 216-433-3504, FAX: 216-433-8705, George.Ponchak@grc.nasa.gov
fYear
2000
fDate
Oct. 2000
Firstpage
1
Lastpage
4
Abstract
Switches with low insertion loss and high isolation are required for switched line phase shifters and for transmit/receive switches at the front end of communication systems. The design, fabrication, and characteristics of a Finite Ground Coplanar (FGC) waveguide capacitive shunt MEMS switch implemented on high resistivity Silicon is presented. The switch has a measured insertion loss and return loss of less than 0.35 dB and greater than 11 dB respectively, over the frequency range of 3 to 50 GHz. The measured isolation is greater than 18 dB at 50 GHz.
Keywords
Communication switching; Conductivity; Coplanar waveguides; Insertion loss; Microswitches; Optical device fabrication; Phase shifters; Propagation losses; Silicon; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2000. 30th European
Conference_Location
Paris, France
Type
conf
DOI
10.1109/EUMA.2000.338708
Filename
4139721
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