Title :
A force balance approach to determining dislocation configurations
Author :
Madebo, M. ; Usher, B.F. ; Riley, J.D.
Author_Institution :
Dept. of Phys., La Trobe Univ., Bundoora, Vic., Australia
Abstract :
A methodology which enables the calculation of threading dislocation configurations for arbitrary multi-layered structures is presented. This methodology includes strain and employs a force-balance approach to attain the equilibrium configuration. This allows technologically important properties of multi-layered structures, such as critical thickness, to be determined.
Keywords :
dislocations; mechanical variables measurement; multilayers; semiconductor quantum wells; thickness measurement; critical thickness; dislocation configurations; equilibrium configuration; force balance approach; force-balance approach; multilayered structures; strain; threading dislocation configurations calculation; Atomic layer deposition; Epitaxial growth; Force measurement; Gallium arsenide; Iron; Physics; Quantum well devices; Semiconductor process modeling; Substrates; Thickness measurement;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
Print_ISBN :
0-7803-7571-8
DOI :
10.1109/COMMAD.2002.1237229
