DocumentCode
2153877
Title
Integrated Millimeter-Wave Silicon Micromachined Filters
Author
Blondy, P. ; Baleras, F. ; Cros, D. ; Massit, C. ; Guillon, P. ; Zanchi, C. ; Lapierre, L. ; Sombrin, J.
Author_Institution
IRCOM, 123 Avenue Albert Thomas 87060 LIMOGES. e-mail: pblondy@ircom.unilim.fr
fYear
2000
fDate
Oct. 2000
Firstpage
1
Lastpage
4
Abstract
This paper describes the design and the fabrication of a new type of millimeter-wave micromachined band pass filters, using silicon waveguides. The main interest of these components is their ability to be integrated along with other MMICs using flip chip bonding techniques. The micromachining fabrication technique allows to maintain very good fabrication tolerances, while the resulting filters are very compact. The design methodology is presented along with two examples of two and four pole filters at 42 GHz.
Keywords
Band pass filters; Conducting materials; Fabrication; Flip chip; MMICs; Machining; Millimeter wave technology; Resonator filters; Silicon; Waveguide components;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2000. 30th European
Conference_Location
Paris, France
Type
conf
DOI
10.1109/EUMA.2000.338709
Filename
4139722
Link To Document