38GHz Aluminum Coplanar Waveguides on Silicon

The loss mechanisms of aluminum coplanar waveguides on silicon are separated into their main components. With means of S-parameter- and CV-measurements we examined the bias dependency of the transmission lines and give a explanation for this behavior. A hybride harmonic mixer was realized on a FZ silicon substrate and measured as a proof for the applicability of aluminum coplanar waveguides in RF circuits. The Schottky mixer diodes are mounted in flip-chip technology. To suppress the parasitic slot line modes we used the novel MIM-(metal-insulator-metal)-connection technique instead of the commonly used air-bridges.