Low-characteristic impedance transmission line fabricated using benzo-cyclo-butene thin film

Author

Sul, Woo-Suk ; Kang, Tea-Sin ; Dan, An ; Chun, Young-Hoon ; Kim, Mi-ra ; Kim, Sam-Dong ; Hwang, In-Suk ; Rhee, Jin-Koo ; Ryu, Gi-Hyon

Author_Institution

Millimeter Innovation Technol. Res. Center, Dongguk Univ., Seoul, South Korea

fYear

2002

fDate

11-13 Dec. 2002

Firstpage

353

Lastpage

356

Abstract

Transmission lines of very low characteristic impedance (Z₀) are fabricated and analyzed. The transmission lines are fabricated on the benzo-cyclo-butene (BCB) films of a low dielectric constant. Two types of coplanar waveguide (CPW) structures are fabricated, which include bottom-ground and double-ground type. Measurement shows that Z₀ values for each CPW type are 7.3 and 9.4 Ω, respectively, at a signal line width of 100 μm. When the ratio between the spacing of bottom-ground and the signal line width becomes greater than 2.5, the Z₀ is nearly saturated. In addition, thin film microstrip lines fabricated using the BCB insertion layers show very low Z₀ of 25.5 Ω, and this impedance is ∼64 % of the values obtained from the BCB-based CPW structures of the same line width.

Keywords

coplanar transmission lines; coplanar waveguides; dielectric thin films; electric impedance; micromechanical devices; microstrip lines; organic compounds; permittivity; 25.5 ohm; 7.3 ohm; 9.4 ohm; benzo-cyclo-butene thin film; bottom-ground coplanar waveguide; coplanar waveguide structures; double-ground coplanar waveguide; insertion layers; low dielectric constant; low-characteristic impedance transmission line; signal line width; thin film microstrip lines fabrication; Coplanar transmission lines; Coplanar waveguides; Dielectric constant; Dielectric measurements; Dielectric thin films; Impedance; Microstrip; Transistors; Transmission line measurements; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on

ISSN

1097-2137

Print_ISBN

0-7803-7571-8

Type

conf

DOI

10.1109/COMMAD.2002.1237263

Filename

1237263