IC-processed electrostatic micro-motors

Author

Long-Sheng Fan ; Yu-Chong Tai ; Muller, R.S.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA

fYear

1988

fDate

11-14 Dec. 1988

Firstpage

666

Lastpage

669

Abstract

The authors describe the design, fabrication, and operation of several micromotors that have been produced using integrated-circuit processing. Both rotors and stators for these motors, which are driven by electrostatic forces, are formed from 1.0-1.5- mu m-thick polycrystalline silicon. The diameters of the rotors in the motors tested are between 60 and 120 mu m. Motors with several friction-reducing designs have been fabricated using phosphosilicate glass (PSG) as a sacrificial material and either one or three polysilicon depositions. Examples of stepping and three-phase synchronous drive micromotors are described. Typical drive voltages for present designs exceed 100 V. Manually switched motors have tested at speeds up to 12 r.p.m. Synchronous motors have been driven at speeds to 500 r.p.m.<>

Keywords

electrostatic devices; integrated circuit technology; monolithic integrated circuits; small electric machines; stepping motors; synchronous motors; 1 to 1.5 micron; 100 V; 60 to 120 micron; P2O5-SiO2; PSG; design; diameters; drive voltages; electrostatic micro-motors; electrostatic motors; fabrication; friction-reducing designs; integrated-circuit processing; micromotors; operation; phosphosilicate glass; polycrystalline Si; rotors; stators; stepping motors; synchronous motors; three-phase synchronous drive micromotors; Electrostatics; Fabrication; Glass; Micromotors; Rotors; Silicon; Stators; Synchronous motors; Testing; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1988. IEDM '88. Technical Digest., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Type

conf

DOI

10.1109/IEDM.1988.32901

Filename

32901