DocumentCode :
2155306
Title :
A micromachined acousto-gravimetric transducer with applications to biomedical sensing
Author :
Meyer, Jorg-Uwe ; Giesler, Thomas
Author_Institution :
Fraunhofer Institute for Biomedical Engineering
fYear :
1993
fDate :
1993
Firstpage :
987
Lastpage :
988
Keywords :
Acoustic signal detection; Acoustic transducers; Acoustic waves; Biomedical transducers; Biomembranes; Chemical analysis; Electrostatics; Fingers; Frequency; Piezoelectric transducers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Engineering in Medicine and Biology Society, 1993. Proceedings of the 15th Annual International Conference of the IEEE
Print_ISBN :
0-7803-1377-1
Type :
conf
DOI :
10.1109/IEMBS.1993.978968
Filename :
978968
Link To Document :
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