DocumentCode
2155738
Title
Laboratory and factory automation for VLSI development and mass production
Author
Shibayama, K. ; Akasaka, Y.
Author_Institution
Mitsubishi Electr. Corp., Hyogo, Japan
fYear
1988
fDate
11-14 Dec. 1988
Firstpage
736
Lastpage
739
Abstract
The authors present a concept for automation in VLSI fabrication and examples of both the automated laboratory line and the mass production line. Particular attention is given to the aims of and items for automation, the system design for laboratory automation, the CAPS (computer-aided processing system) design, the computer hierarchy of the factory line, and the data acquisition and analysis system.<>
Keywords
CAD/CAM; VLSI; factory automation; integrated circuit manufacture; integrated circuit technology; CAPS; CIM; VLSI development; VLSI fabrication; aims of automation; automated laboratory line; computer hierarchy; computer integrated manufacturing; computer-aided processing system; data acquisition and analysis system; factory automation; factory line; laboratory automation; mass production line; system design; Data acquisition; Design automation; Fabrication; Laboratories; Manufacturing automation; Mass production; Process design; Production facilities; System analysis and design; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1988. IEDM '88. Technical Digest., International
Conference_Location
San Francisco, CA, USA
ISSN
0163-1918
Type
conf
DOI
10.1109/IEDM.1988.32917
Filename
32917
Link To Document