MEMS for future microwave systems

RF MEMS has been investigated extensively over the past decade. Interest in this technology was initially motivated by recognition of its potential to enable superior electronically scanned antennas (ESAs) due to the practically ideal performance of MEM-based switches utilized to implement low loss phase shifters, one of the key elements of ESAs. However, while the virtues of RF MEMS to enhance ESA performance, and many other conventional microwave systems are clear, convergence to manufacturable products has been slow. This paper provides an overview of RF MEMS applications, technology and achievements, and projections on the trends for future developments.