Study on the quadrature error under Varying ambient pressure for a bulk micromachined Z-axis gyroscope

Author

Cui, Jian ; Lin, Longtao ; Guo, Zhongyang ; Chi, Xiaozhu ; Zhao, Qiancheng ; Yang, Zhenchuan ; Yan, Guizhen

Author_Institution

Inst. of Microelectron., Peking Univ., Beijing, China

fYear

2008

fDate

20-23 Oct. 2008

Firstpage

2440

Lastpage

2443

Abstract

This paper focused on the study of the quadrature error for a bulk micromachined gyroscope under varying pressure conditions between 150 Pa and 100 kPa. The source of the quadrature error and the non-ideal model of the micromachined gyroscope are presented with details. The change trend and characterization of pressure dependence were analyzed both analytically and experimentally in the custom-built installation. The results indicated that in order to meet high resolution and stabilization of the quadrature error, the optimal working pressure applied to the gyroscope must limit to a certain boundary condition. At last, some effective methods of restraining the quadrature error were put forward.

Keywords

gyroscopes; micromechanical devices; Z-axis gyroscope; boundary condition; bulk micromachined gyroscope; nonideal model; pressure 150 Pa to 100 kPa; quadrature error; varying ambient pressure; 1f noise; Coupling circuits; Crosstalk; Fabrication; Force sensors; Gyroscopes; Laboratories; Microelectronics; Q factor; Springs; micromachined gyroscope; pressure; quadrature error; vacuum sealed;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2185-5

Electronic_ISBN

978-1-4244-2186-2

Type

conf

DOI

10.1109/ICSICT.2008.4735065

Filename

4735065