Monolithic integration of bulk micro-machined capacitive accelerometer and signal conditioning circuit

This paper presents a bulk micro-machined single axis accelerometer with analog signal conditioning circuit on a single chip. Design advantages include combining electrical isolation structures and mechanical connection structures with insulating materials refilled trenches to increase transducer sensitivity by minimizing parasitic capacitance, and lower package cost due to post-CMOS process. Several easy-tune techniques have been used to decrease the offset and increase the output signal amplitude.