Title :
Current MEMS technology and MEMS sensors -focusing on inertial sensors-
Author :
Maenaka, Kazusuke
Author_Institution :
Grad. Sch. of Eng., Univ. of Hyogo, Himeji, Japan
Abstract :
In this paper, current micro electro mechanical systems (MEMS) technology and some inertial sensors will be discussed. MEMS technology is presently becoming a key technology for future microelectronics. Some remarkable developments in MEMS are the driving force behind the current MEMS field, and many MEMS devices in the market are using these technologies effectively. Some particularly remarkable MEMS technologies and devices are described in this paper.
Keywords :
integrated circuits; microsensors; MEMS sensor; inertial sensor; microelectromechanical systems technology; microelectronics; Etching; Integrated circuit technology; Mechanical sensors; Microelectronics; Micromachining; Micromechanical devices; Plasma density; Sensor phenomena and characterization; Sensor systems; Silicon;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4735069
