Title :
Fabrication of novel cantilever with nanotip for AFM applications
Author :
Li, Li ; Han, Xiang ; Wu, Wengang ; Ding, Fei ; Chen, Qinghua
Author_Institution :
Inst. of Microelectron., Peking Univ., Beijing, China
Abstract :
As a first step to realize novel cantilevers to be used in the atomic force microscopy (AFM), we have fabricated a Poly-Si cantilever with enhanced high-aspect-ratio nanotips. The tips with well controlled dimensions are fabricated by crossed spacer technology and the flexibility of the cantilever and the nanotips according to demand can be easily realized by designing the pattern and tuning the etching time in the fabrication process. The tips on the cantilever, with 1.2 ¿m height, have a high aspect ratio of 7:1. This nanotip on the cantilevers can not only be used as an AFM probe, it can also be extended to any two-dimensional nanotip arrays to be widely used in biomedical field such as biomedical specimen micro-extractions and transportations.
Keywords :
atomic force microscopy; cantilevers; etching; nanotechnology; AFM probe; atomic force microscopy; biomedical field; biomedical specimen microextractions; cantilever; etching time; high aspect ratio; nanotips; transportations; Anisotropic magnetoresistance; Atomic force microscopy; Dry etching; Fabrication; Force sensors; Head; Lithography; Probes; Space technology; Transportation; Atomic force microscopy; Cantilever; High-aspect-ratio; Nanotip; Spacer technology;
Conference_Titel :
Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2185-5
Electronic_ISBN :
978-1-4244-2186-2
DOI :
10.1109/ICSICT.2008.4735072
