DocumentCode :
2156553
Title :
A broadband surface-micromachined 15-45 GHz microstrip coupler
Author :
Pan, Bo ; Yoon, Y. ; Zhao, Y.Z. ; Papapolymerou, J. ; Tentzeris, M.M. ; Allen, M.
fYear :
2005
fDate :
12-17 June 2005
Abstract :
A broadband elevated microstrip coupler has been designed and implemented on the soda-lime glass with surface micromachining technology. The coupler is elevated by 200 μm and fed by a combination of epoxy-core metal post and coplanar waveguide, which helps eliminate the conventional air/dielectric interface problems. By this method, frequency dispersion and attenuation due to the substrate can be effectively reduced. A 10 dB return loss and a 12.5 dB coupling is measured in our experiment over 15-45 GHz. The proposed structure can be implemented on very lossy substrates, such as standard CMOS substrate and thus can be applied into the integration of high performance RF components with digital or optical functions/subsystems on low-cost low-resistivity silicon wafers.
Keywords :
coplanar waveguides; dispersion (wave); micromachining; microstrip directional couplers; millimetre wave directional couplers; surface treatment; 10 dB; 12.5 dB; 15 to 45 GHz; 200 micron; RF components; broadband coupler; coplanar waveguide; digital functions; epoxy-core metal post; frequency dispersion; lossy substrates; low-resistivity silicon wafers; microstrip directional coupler; optical functions; soda-lime glass; surface micromachining technology; Coplanar waveguides; Dielectric loss measurement; Dielectric substrates; Frequency; Glass; Micromachining; Microstrip; Optical losses; Optical surface waves; Optical waveguides;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium Digest, 2005 IEEE MTT-S International
ISSN :
01490-645X
Print_ISBN :
0-7803-8845-3
Type :
conf
DOI :
10.1109/MWSYM.2005.1516831
Filename :
1516831
Link To Document :
بازگشت