Integrated CMOS-MEMS technology and its applications

Author

Morimura, Hiroki ; Mutoh, Shinichiro ; Ishii, Hiromu ; Machida, Katsuyuki

Author_Institution

NTT Microsyst. Integration Labs., Kanagawa, Japan

fYear

2008

fDate

20-23 Oct. 2008

Firstpage

2460

Lastpage

2463

Abstract

The paper describes integrated CMOS-MEMS technology and its applications. We discuss the features of integrated complementary metal-oxide-semi-conductor-microelectromechanical systems (CMOS- MEMS). The prospect of this integration is also presented. A MEMS fingerprint sensor and a low-voltage radio frequency (RF) CMOS-MEMS switch are the case studies discussed. In conclusion, it is confirmed that the integrated CMOS-MEMS technology will pave the way for the more than Moore technology.

Keywords

CMOS integrated circuits; large scale integration; microsensors; microswitches; radiofrequency integrated circuits; MEMS; complementary metal-oxide-semiconductor LSI; fingerprint sensor; microelectromechanical systems; radio frequency switch; Accelerometers; CMOS technology; Fingerprint recognition; Integrated circuit technology; Large scale integration; Microelectromechanical devices; Micromechanical devices; Radio frequency; Radiofrequency integrated circuits; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2185-5

Electronic_ISBN

978-1-4244-2186-2

Type

conf

DOI

10.1109/ICSICT.2008.4735089

Filename

4735089