Merging SoC and LOC together

Author

Li, Zhihong ; Ji, Xu ; Wang, Lu ; Xi, Jianzhong

Author_Institution

Nat. Key Lab. of Nano/Micro Fabrication Technol., Peking Univ., Beijing, China

fYear

2008

fDate

20-23 Oct. 2008

Firstpage

2553

Lastpage

2556

Abstract

A promising combination of the semiconductor integrated system-on-a-chip (SoC) with the lab-on-a-chip (LOC) is brought in this paper. In this paper, we propose a new technology which enables monolithic integration of the self-assembled biological system, the MEMS structure, the microfluidic system, and CMOS electronic circuits together. Utilizing this approach, more functionality is introduced into the SoC, while the LOC becomes more intelligent and controllable. A post-CMOS fabrication approach that meets the requirements is demonstrated to validate the idea.

Keywords

CMOS integrated circuits; bioMEMS; lab-on-a-chip; microfluidics; self-assembly; system-on-chip; CMOS electronic circuits; LOC; MEMS structure; SoC; lab-on-a-chip; microfluidic system; monolithic integration; self-assembled biological system; semiconductor integrated system-on-a-chip; Biological systems; CMOS technology; Electronic circuits; Integrated circuit technology; Lab-on-a-chip; Merging; Microfluidics; Micromechanical devices; Monolithic integrated circuits; System-on-a-chip;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2008. ICSICT 2008. 9th International Conference on

Conference_Location

Beijing

Print_ISBN

978-1-4244-2185-5

Electronic_ISBN

978-1-4244-2186-2

Type

conf

DOI

10.1109/ICSICT.2008.4735107

Filename

4735107