Seven easy steps for designing the four-terminal silicon pressure piezotransducer

The analytical method for designing of the four-terminal silicon pressure piezotransducer (FTSP transducer) with various geometrical form of the current spread region (CSR) is presented. In this paper the crystal planes of silicon [100] and [110] were considered, the optimal places for location as well as the optimal angular orientations of the transducer on the surface of crystal are shown. Various geometrical forms of current spread region of the FTSP transducer, such as circle, square, octagon, symmetrical cross are investigated. As a result, the geometrical correction functions are presented for all investigated. geometrical forms of the CSR. The matrix of resistances, which is allowing to calculate the output voltage and the sensitivity of the FTSP transducer, is presented in this paper as well. The effect of decreasing of planar sizes of the CSR in comparison with depth of the piezosensitive layer is discussed. The circuit for the temperature compensation is suggested.