Title :
Thermoelectrically controlled varifocal micromirror for near aberration free imaging
Author :
Li Li ; Ran Li ; Lubeigt, Walter ; Uttamchandani, Deepak
Author_Institution :
Univ. of Strathclyde, Glasgow, UK
Abstract :
A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.
Keywords :
Peltier effect; Zernike polynomials; differential thermal analysis; gold; micromirrors; silicon; thermal expansion; Si-Au; Zernike coefficients; close-loop-controlled miniature Peltier element; curvature radius; differential thermal expansion; near aberration free imaging; silicon-gold bimorph varifocal micromirror; size 1.2 mm; size 19.2 nm to 30.9 nm; temperature 10 degC to 100 degC; thermoelectrically controlled varifocal micromirror; Biomedical optical imaging; Micromirrors; Optical films; Optical imaging; Temperature control; Temperature measurement;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659037
