Thermoelectrically controlled varifocal micromirror for near aberration free imaging

Author

Li Li ; Ran Li ; Lubeigt, Walter ; Uttamchandani, Deepak

Author_Institution

Univ. of Strathclyde, Glasgow, UK

fYear

2013

fDate

18-22 Aug. 2013

Firstpage

17

Lastpage

18

Abstract

A close-loop-controlled miniature Peltier element was used to vary the temperature of a 1.2 mm diameter silicon-gold bimorph varifocal micromirror (VFM), thereby changing its radius of curvature due to differential thermal expansion of the two materials. By varying the VFM temperature from 10°C to 100°C, the radius of curvature (ROC) of the micromirror was measured to vary from 19.2mm to 30.9mm. The Zernike coefficients over this operational range were analysed to be less than a few micrometres. An imaging system utilising the VFM was assembled, and examples of the near aberration-free images obtained are presented.

Keywords

Peltier effect; Zernike polynomials; differential thermal analysis; gold; micromirrors; silicon; thermal expansion; Si-Au; Zernike coefficients; close-loop-controlled miniature Peltier element; curvature radius; differential thermal expansion; near aberration free imaging; silicon-gold bimorph varifocal micromirror; size 1.2 mm; size 19.2 nm to 30.9 nm; temperature 10 degC to 100 degC; thermoelectrically controlled varifocal micromirror; Biomedical optical imaging; Micromirrors; Optical films; Optical imaging; Temperature control; Temperature measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2013 International Conference on

Conference_Location

Kanazawa

ISSN

2160-5033

Print_ISBN

978-1-4799-1512-5

Type

conf

DOI

10.1109/OMN.2013.6659037

Filename

6659037