DocumentCode
2163057
Title
Fabrication and characterization of thin-film nanostructured Lüneburg lens
Author
Chih-Hung Hsieh ; Jun Xu ; Hanhong Gao ; Fang, Nicholas X. ; Barbastathis, George
Author_Institution
Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear
2013
fDate
18-22 Aug. 2013
Firstpage
35
Lastpage
36
Abstract
A thin-film nanostructured Lüneburg lens with guidance condition correction has been fabricated by patterning a slab of silicon-rods on silicon-on-insulator wafer, and has been characterized using a near-field scanning optical microscope.
Keywords
elemental semiconductors; lenses; nanopatterning; nanophotonics; nanorods; optical fabrication; optical films; optical microscopy; semiconductor thin films; silicon; silicon-on-insulator; Si; guidance condition correction; near-field scanning optical microscopy; optical fabrication; silicon-on-insulator wafer; silicon-rods; slab nanopatterning; thin-film nanostructured Luneburg lens; Adaptive optics; Finite difference methods; Indexes; Lenses; Optical device fabrication; Time-domain analysis; Nanostructured Lüneburg lens; near-field scanning optical microscope; proximity effect;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location
Kanazawa
ISSN
2160-5033
Print_ISBN
978-1-4799-1512-5
Type
conf
DOI
10.1109/OMN.2013.6659046
Filename
6659046
Link To Document