Title :
Polymer optical MEMS integrated on VCSELs for biosensing
Author :
Bardinal, Veronique ; Camps, Thierry ; Reig, Benjamin ; Doucet, Jean-Baptiste ; Abada, Sami ; Daran, Emmanuelle
Author_Institution :
LAAS, Toulouse, France
Abstract :
We present our recent advances on design and fabrication of polymer optical MEMS that can be directly integrated on VCSELs arrays for dynamic beam focusing. These studies open new insights for the fabrication of compact optical sensors that require a real-time scan of laser beam position.
Keywords :
bioMEMS; biosensors; microfabrication; microsensors; optical polymers; optical sensors; surface emitting lasers; two-dimensional digital filters; VCSELS; biosensing; compact optical sensor fabrication; dynamic beam focusing; integrated polymer optical MEMS; laser beam position; polymer optical MEMS design; polymer optical MEMS fabrication; real-time scan; vertical-cavity surface-emitting lasers; Biomedical optical imaging; Micromechanical devices; Optical device fabrication; Optical polymers; Optical sensors; Vertical cavity surface emitting lasers;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659052
