Title :
Integration of angular rate sensor on large deflection polymer-MEMS mirror
Author :
Yamashita, Hiromasa ; Terao, Kyohei ; Takao, Hidekuni ; Shimokawa, Fusao ; Oohira, Fumikazu ; Suzuki, Takumi
Author_Institution :
Dept. of Intell. Mech. Syst. Eng., Kagawa Univ., Takamatsu, Japan
Abstract :
Repeatability of driving characteristics of a polymer-MEMS mirror are transitioned by an environment and time course change. In this study, we propose a method of motion sensing for the purpose of laser scan stable by the active control of a polymer-MEMS mirror. A proposed motion sensor is a coil-type sensor that induces the electric current by an electromagnetic induction and monolithically integrated on the mirror driving by the electromagnetic force. The fabricated mirror made of SU-8 polymer deflects over ±30deg. at low electric current. The measured current induced by the integrated sensor coil is clearly obtained by applying the lock-in detection for signal processing method, and it indicates that the feasibility of amplitude control of the polymer MEMS mirror.
Keywords :
integrated optics; micro-optomechanical devices; micromirrors; microsensors; optical fabrication; optical polymers; SU-8 polymer; amplitude control; angular rate sensor integration; electric current; electromagnetic force; electromagnetic induction; integrated coil-type sensor; large deflection polymer-MEMS mirror; laser scanning; lock-in detection; motion sensing; optical fabrication; signal processing method; Coils; Fasteners; Micromechanical devices; Mirrors; Optical device fabrication; Optical sensors; Polymers;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659063
