Title :
Magnetically actuated swing-type micromirror
Author :
Hsu-Tang Chang ; Chun-Wei Tsai ; Shih-Hsiang Liu ; Jui-che Tsai
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
This paper presents a 45°-assembled swing-type micromirror fabricated with the SOIMUMPs process. Magnetic beads are attached to the backside of the mirror, making it possible to actuate the mirror magnetically. A swing range of > 16° is achieved. The device can be used in optical interconnects and optical pickup heads.
Keywords :
micromirrors; optical fabrication; SOIMUMP process; magnetic beads; magnetically actuated swing-type micromirror; optical fabrication; optical interconnects; optical pickup heads; Assembly; Magnetic flux; Magnetic resonance imaging; Magnetometers; Micromirrors; Optical device fabrication; magnetic actuation; micromirror;
Conference_Titel :
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location :
Kanazawa
Print_ISBN :
978-1-4799-1512-5
DOI :
10.1109/OMN.2013.6659064
