Dual-axis polymer-MEMS mirror made of Photosensitive Nanocomposite

Author

Suzuki, Jun ; Miura, Tsuyoshi ; Terao, Kyohei ; Takao, Hidekuni ; Shimokawa, Fusao ; Namazu, T. ; Oohira, Fumikazu ; Suzuki, Takumi

Author_Institution

Dept. of Intell. Mech. Syst. Eng., Kagawa Univ., Takamatsu, Japan

fYear

2013

fDate

18-22 Aug. 2013

Firstpage

101

Lastpage

102

Abstract

We propose a simple fabrication method for a dual-axis polymer MEMS mirror made of negative photoresist SU-8 containing magnetic nanoparticles as a magnetically driven actuator. The proposed mirror is driven by magnetic attractive force using external magnetic field. So, it doesn´t need complex wiring patterns and can simply fabricate by photolithography only. For evaluation of drive characteristics of the proposed mirror, we measured static deflection angle and frequency response of the fabricated mirror by using a laser position sensor. As a result, we obtained optical deflection angle ±15deg. and the second resonant frequency 29.2Hz of torsional oscillation.

Keywords

magnetic particles; micromechanical devices; micromirrors; nanocomposites; nanolithography; nanomagnetics; nanoparticles; optical fabrication; optical polymers; photodetectors; photolithography; photoresists; dual-axis polymer-MEMS mirror; external magnetic field; frequency 29.2 Hz; frequency response; laser position sensor; magnetic attractive force; magnetic nanoparticles; magnetically driven actuator; measured static deflection angle; negative photoresist SU-8; optical deflection angle; photolithography; photosensitive nanocomposite; simple fabrication method; torsional oscillation; Electromagnets; Magnetic resonance; Micromechanical devices; Mirrors; Optical device fabrication; Optical sensors; Polymers;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2013 International Conference on

Conference_Location

Kanazawa

ISSN

2160-5033

Print_ISBN

978-1-4799-1512-5

Type

conf

DOI

10.1109/OMN.2013.6659079

Filename

6659079