Silicon single-electron memory and logic devices for room temperature operation

Silicon single-electron memory and logic devices, which can operate normally at room temperature, are described. Doubly stacked floating dot memory can overcome data-retention issues. In SiN dot memory, the idea of an advanced device incorporating quantum concept into existing device is proposed. The SiN dot memory is applicable to the doubly stacked floating dot memory concept for a total solution. Programmable SET logic can be an innovative SET operation scheme realizing high functionality over conventional CMOS logic.