Integration of silicon etched waveguides with MCM-D for V- and W-band

This paper describes the design, analysis and realization of a fully planar transition from stripline to silicon waveguide. The trapezoidal waveguide is wet etched in silicon and bonded to an MCM-D structure containing the transition. The transition consists of a stripline ending in a resonating rectangular BCB cavity. Power is fed from this cavity to the waveguide through a slot in the bottom plane of the waveguide which is formed on the top metallization of the MCM-D structure. Transitions were designed at 60 GHz and 100 GHz. The simulated insertion loss of the transition is 1.1 dB at 60 GHz and 1 dB at 100 GHz. The transition bandwidths are 10.8% and 9.1%, respectively.