DocumentCode
2165563
Title
Fabrication and measurements using ultra-tall near-field coaxial tips
Author
Wang, Yaqiang ; Paulson, Charles A. ; Ning, Guoqing ; Van der Weide, Daniel W.
Author_Institution
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
fYear
2005
fDate
12-17 June 2005
Abstract
We present a new method for microfabrication of coaxial silicon tips with heights >50 μm. The coaxial silicon tip acts as an electrically small antenna. Microwave measurements using a microfabricated coaxial tip chip are performed with a network analyzer HP8753D and an atomic force microscope (AFM). Scanning near-field microwave microscopy (SNMM) using the ultra-tall coaxial tip is demonstrated with a commercial AFM silicon probe in noncontact mode as a sample.
Keywords
atomic force microscopy; coaxial waveguides; silicon; sputter etching; HP8753D network analyzer; Si; atomic force microscopy; coaxial silicon tips; deep reactive ion etching; microelectromechanical systems; microfabrication method; microwave measurements; scanning near-field microwave microscopy; ultra-tall near-field coaxial tips; Antenna measurements; Atomic force microscopy; Atomic measurements; Coaxial components; Fabrication; Force measurement; Microwave measurements; Performance evaluation; Semiconductor device measurement; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 2005 IEEE MTT-S International
ISSN
01490-645X
Print_ISBN
0-7803-8845-3
Type
conf
DOI
10.1109/MWSYM.2005.1517174
Filename
1517174
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