• DocumentCode
    2166094
  • Title

    Bulk Silicon Micro-Machined MEM Switches For Millimeter-Wave Applications

  • Author

    Grenier, K. ; Pons, P. ; Plana, R. ; Graffeuil, J.

  • Author_Institution
    LAAS/CNRS, 7 av. du Colonel Roche, 31 077 TOULOUSE cedex 4, France; Université Paul Sabatier, 118 Route de Narbonne, 31 062 Toulouse cedex 4, France
  • fYear
    2001
  • fDate
    24-26 Sept. 2001
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    This paper deals with the realization of micro-electro-mechanical (MEM) components dedicated to microwave and millimeter-wave applications and focuses on the advantage of using bulk silicon micro-machining. The silicon substrate etching benefits have been demonstrated through both electromagnetic simulations and measurements of a single MEM switch. Important improvements in term of insertion loss and isolation have been obtained. Further developments in term of distributed switches are addressed.
  • Keywords
    Biomembranes; Bridge circuits; Communication switching; Conductors; Coplanar waveguides; Design methodology; Insertion loss; Silicon; Switches; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2001. 31st European
  • Conference_Location
    London, England
  • Type

    conf

  • DOI
    10.1109/EUMA.2001.339132
  • Filename
    4140200
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2166094