Title :
Correlations of vibrational frequencies with VO4 defect in irradiated silicon
Author :
Sarlis, N.V. ; Londos, C.A. ; Fytros, L.G.
Author_Institution :
Dept. of Phys., Athens Univ., Greece
Abstract :
This paper reports infrared spectroscopy studies on oxygen related defects in Czochralsky grown neutron irradiated Silicon material subsequently submitted to heat treatment. The sequential formation of various VOn (n=1,2,3,4) defects according to the reaction process VO→VO2→VO3→VO4 is investigated. We argue that on increasing the annealing temperature different sites for the addition of oxygen atoms become available, triggering for n>2 two parallel formation sequencies in relation with VO3 and VO4 defects. Thus in the first sequence the oxygen atoms are added in adjacent sites to VO2 defect although in the second sequence the oxygen atoms are added in the same vacant site of VO2 defect
Keywords :
annealing; elemental semiconductors; impurity absorption spectra; impurity-vacancy interactions; infrared spectra; localised modes; neutron effects; oxygen; silicon; Czochralski grown neutron irradiated silicon; Si:O; VO4 defect; annealing; heat treatment; infrared spectroscopy; oxygen-vacancy pair; vibrational frequency; Absorption; Annealing; Atomic measurements; Dispersion; Frequency estimation; Infrared spectra; Neutrons; Silicon; Spectroscopy; Temperature;
Conference_Titel :
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3804-9
DOI :
10.1109/SMICND.1997.651549