DocumentCode
2167131
Title
Characterization of CMOS Spiral Inductors
Author
Palazzaril, V. ; Placidi, P. ; Stopponi, G. ; Ciampolini, P. ; Alimenti, F. ; Roselli, L. ; Scorzoni, A.
Author_Institution
DIEI, UniversitÃ\xa0 di Perugia, via G. Duranti 93, 06125 Perugia, Italy. Tel: +39-75-585.3637, Fax: +39-75-585.3654, E-mail: palazzari@diei.unipg.it
fYear
2001
fDate
24-26 Sept. 2001
Firstpage
1
Lastpage
3
Abstract
In this work "full-wave" simulations of integrated inductors are presented and compared with measurements of fabricated CMOS chips. The good agreement between measurements and simulations demonstrates the accuracy of the tool, which is, hence, a cheaper alternative to experimental characterization. Furthermore, the proposed approach may give precious hints for performance improvements, by making internal device fields and currents available for the VLSI designer and providing compact, most effective, equivalent models.
Keywords
CMOS technology; Finite difference methods; Frequency; Inductors; Magnetic field measurement; Maxwell equations; Q factor; Semiconductor device measurement; Spirals; Time domain analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2001. 31st European
Conference_Location
London, England
Type
conf
DOI
10.1109/EUMA.2001.339167
Filename
4140235
Link To Document