DocumentCode
2167260
Title
Modelling and optimisation for an electrostatic actuation of a valveless micropump using a silicon buckled membrane
Author
Popescu, Dan S. ; Lerch, Philippe ; Dunare, Camelia ; Dascalu, Dan
Author_Institution
Dept. of Electron., Univ. Politehnica Bucharest, Romania
Volume
1
fYear
1997
fDate
7-11 Oct 1997
Firstpage
157
Abstract
An electrostatic actuator for micropumps driving has been designed. Modelling and optimisation of the actuator have been made for obtaining small driving voltages for harmonic oscillations in the kHz frequency range with submicrometer amplitudes and for developing improved external forces
Keywords
buckling; electrostatic devices; elemental semiconductors; membranes; microactuators; micropumps; silicon; Si; driving voltage; electrostatic actuator; harmonic oscillation; modelling; optimisation; silicon buckled membrane; valveless micropump; Biomembranes; Compressive stress; Electrostatic actuators; Electrostatic analysis; Harmonic analysis; Micropumps; Silicon; Springs; Switches; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference, 1997. CAS '97 Proceedings., 1997 International
Conference_Location
Sinaia
Print_ISBN
0-7803-3804-9
Type
conf
DOI
10.1109/SMICND.1997.651570
Filename
651570
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