• DocumentCode
    2167861
  • Title

    High performance silicon accelerometers with charge controlled rebalance electronics

  • Author

    Warren, Keith

  • Author_Institution
    Litton Guidance & Control Syst., Woodland Hills, CA, USA
  • fYear
    1996
  • fDate
    22-26 Apr 1996
  • Firstpage
    27
  • Lastpage
    30
  • Abstract
    A charge-controlled, force rebalanced accelerometer loop is described, along with its advantages over prior voltage-controlled forcing methods. First generation silicon accelerometers incorporating charge-controlled electronics are performing well in current production systems. A new all silicon accelerometer chip is being developed for higher accuracy applications
  • Keywords
    accelerometers; elemental semiconductors; micromechanical devices; silicon; wafer bonding; Si; accelerometers; accuracy; charge controlled rebalance electronics; force rebalanced accelerometer loop; micromechanical devices; production systems; Accelerometers; Electrodes; Electrostatics; Equations; Force control; Permittivity; Servomechanisms; Silicon; Springs; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Position Location and Navigation Symposium, 1996., IEEE 1996
  • Conference_Location
    Atlanta, GA
  • Print_ISBN
    0-7803-3085-4
  • Type

    conf

  • DOI
    10.1109/PLANS.1996.509052
  • Filename
    509052
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2167861