Accurate measurement and characterization up to 50 GHz of CPW-based integrated passives in microwave MCM-D

Multi-layer CPW-based models are not readily available in commercial simulators. Accurate scaleable models have therefore been implemented and incorporated in a design library offering automated layout. In this way, first-time-right design becomes feasible. A scaleable table-based transmission line model has been implemented. The characteristic impedance and effective dielectric constant of the line are generated by a quasi-TEM program. The line losses for an arbitrary line-geometry are predicted based on a set of measurements of lines with a fixed ground-to-ground distance. Good agreement between measured and simulated performance has been found. The TaN thin-film resistors are modeled using an RLCG transmission line model. It is shown that R (series resistance per unit length) can be considered constant and is directly determined by the sheet resistance and resistor-width. L and C (series inductance and shunt capacitance-to-ground per unit length) are derived from the Z_c and ε_eff of an equivalent transmission line in which the resistor-layer is replaced by metal. Excellent agreement between measured and simulated results has been found up to 50 GHz. Scaleable models have also been implemented for square Ta₂O₅-capacitors in series and shunt-to-ground configuration