Nanoscale Laser Processing using Near-Field Optics

Author

Grigoropoulos, Costas P. ; Hwang, David J.

Author_Institution

California Univ., Berkeley

fYear

2007

fDate

17-22 June 2007

Firstpage

1

Lastpage

1

Abstract

Confinement of optical energy to small dimensions can be achieved by coupling laser irradiation to near-field scanning optical microscopes. The surface topography, texture, crystalline structure and chemical composition could be modified with lateral feature definition in the nanometer range by coupling nanosecond and femtosecond laser beams to NSOM probes in both apertured and apertureless configurations.

Keywords

laser ablation; nanotechnology; near-field scanning optical microscopy; surface texture; surface topography; surface treatment; apertured configurations; apertureless configurations; chemical composition; crystalline structure; femtosecond laser beams; laser ablation; nanoscale laser processing; nanosecond laser beams; near-field optics; near-field scanning optical microscopes; surface texture; surface topography; Chemical lasers; Crystallization; Laser beams; Optical coupling; Optical microscopy; Probes; Surface emitting lasers; Surface texture; Surface topography; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on

Conference_Location

Munich

Print_ISBN

978-1-4244-0931-0

Electronic_ISBN

978-1-4244-0931-0

Type

conf

DOI

10.1109/CLEOE-IQEC.2007.4386678

Filename

4386678