Title :
Silicon micro- and nanostructures formed by femtosecond laser pulses
Author :
Golovan, L.A. ; Zabotnov, S.V. ; Ostapenko, L.A. ; Ezhov, A.A. ; Lastovkina, M.A. ; Chervyakov, A.V. ; Timoshenko, V.Yu. ; Panov, V.I. ; Kashkarov, P.K. ; Shandybina, G.D.
Author_Institution :
Moscow State Univ., Moscow
Abstract :
This paper investigates the silicon surfaces structured by femtosecond laser pulses by the scanning electron microscopy (SEM), atomic-force microscopy (AFM), third-harmonic (TH) generation, photoluminescence (PL), and Raman spectroscopy techniques.
Keywords :
Raman spectra; atomic force microscopy; elemental semiconductors; high-speed optical techniques; laser beam effects; laser materials processing; nanoparticles; optical harmonic generation; photoluminescence; scanning electron microscopy; silicon; surface treatment; Raman spectroscopy; Si; atomic-force microscopy; femtosecond laser pulses; nanostructures; photoluminescence; scanning electron microscopy; third-harmonic generation; Atom lasers; Atomic beams; Atomic force microscopy; Nanostructures; Optical pulse generation; Optical pulses; Photoluminescence; Scanning electron microscopy; Silicon; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 2007 and the International Quantum Electronics Conference. CLEOE-IQEC 2007. European Conference on
Conference_Location :
Munich
Print_ISBN :
978-1-4244-0931-0
Electronic_ISBN :
978-1-4244-0931-0
DOI :
10.1109/CLEOE-IQEC.2007.4386679
