Dynamic macromodeling of MEMS mirror devices

Electrostatically actuated MEMS mirror devices are finding increasing use in the field of optical communications and displays. In addition to the static displacement-voltage characteristics, accurate transient characterization of these devices is becoming increasingly important. The latter is strongly affected by viscous damping of the surrounding air. A complete analysis of the dynamic behavior should consist of coupled transient simulations including electrostatics, stress, deformation, and air fluidics. Direct numerical dynamic simulation based on fully-meshed structures is computationally very expensive. In order to perform efficient design prediction and optimization, designers need dynamically accurate macromodels for these devices. Such models need to reduce the computation cost without compromising accuracy. In this paper, we present techniques to develop such macromodels.