Title :
Modeling tool failures in semiconductor fab simulation
Author_Institution :
Inst. of Comput. Sci., Wurzburg Univ., Germany
Abstract :
In this research, we investigate how well Weibull, Gamma, and special bimodal distribution are suited as an alternative to the exponential distribution approach in the stochastic modeling of machine downtimes and times between failures. We also discuss the question whether sampling shop-floor data should not only include first order statistics, but also measures that allow to monitor and model the variability of the equipment and processes and even the correct distribution of the data.
Keywords :
digital simulation; exponential distribution; production equipment; semiconductor device manufacture; stochastic processes; bimodal distribution; data distribution; exponential distribution; machine downtimes; sampling shop-floor data; semiconductor fab simulation; statistics; stochastic modeling; tool failures; Computational modeling; Computer science; Computer simulation; Context modeling; Equipment failure; Histograms; Production facilities; Shape; Stochastic processes; Time measurement;
Conference_Titel :
Simulation Conference, 2004. Proceedings of the 2004 Winter
Print_ISBN :
0-7803-8786-4
DOI :
10.1109/WSC.2004.1371548
