Title :
Pits topography measurement by atomic force microscope with carbon nano tube probe
Author :
Kuwahara, Masashi ; Abe, H. ; Tokumoto, H. ; Tominaga, J.
Author_Institution :
Lab. for Adv. Opt. Technol., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
Abstract :
In this study, we fabricated tiny pits with 200-nm dimension for an ultra-high-density optical ROM disk by an electron beam (EB) lithography technique, and observed the topographies of the pits by atomic force microscopy (AFM). Comparison between the images obtained with or without the carbon nanotube (CNT) probe, we clarify the CNT probe is highly effective for the observation of the minute pits, and also we describe several problems and advantages in the usage of CNT probe.
Keywords :
atomic force microscopy; carbon nanotubes; electron beam lithography; optical disc storage; surface topography measurement; 200 nm; C; atomic force microscope; carbon nanotube probe; electron beam lithography; pit topography measurement; ultra-high-density optical ROM disk; Atom optics; Atomic force microscopy; Atomic measurements; Electron beams; Electron optics; Force measurement; Optical microscopy; Probes; Read only memory; Surfaces;
Conference_Titel :
Optical Memory and Optical Data Storage Topical Meeting, 2002. International Symposium on
Print_ISBN :
0-7803-7379-0
DOI :
10.1109/OMODS.2002.1028716
