Pits topography measurement by atomic force microscope with carbon nano tube probe

Author

Kuwahara, Masashi ; Abe, H. ; Tokumoto, H. ; Tominaga, J.

Author_Institution

Lab. for Adv. Opt. Technol., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba

fYear

2002

fDate

2002

Firstpage

63

Lastpage

65

Abstract

In this study, we fabricated tiny pits with 200-nm dimension for an ultra-high-density optical ROM disk by an electron beam (EB) lithography technique, and observed the topographies of the pits by atomic force microscopy (AFM). Comparison between the images obtained with or without the carbon nanotube (CNT) probe, we clarify the CNT probe is highly effective for the observation of the minute pits, and also we describe several problems and advantages in the usage of CNT probe.

Keywords

atomic force microscopy; carbon nanotubes; electron beam lithography; optical disc storage; surface topography measurement; 200 nm; C; atomic force microscope; carbon nanotube probe; electron beam lithography; pit topography measurement; ultra-high-density optical ROM disk; Atom optics; Atomic force microscopy; Atomic measurements; Electron beams; Electron optics; Force measurement; Optical microscopy; Probes; Read only memory; Surfaces;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Memory and Optical Data Storage Topical Meeting, 2002. International Symposium on

Print_ISBN

0-7803-7379-0

Type

conf

DOI

10.1109/OMODS.2002.1028716

Filename

1028716