Title :
High performance selectively oxidized VCSELs and arrays for parallel high-speed optical interconnects
Author :
Mederer, F. ; Grabherr, M. ; Eberhard, F. ; Ecker, I. ; Jäger, R. ; Joos, J. ; Jung, C. ; Kicherer, M. ; King, R. ; Schnitzer, P. ; Unold, H. ; Wiedenmann, D. ; Ebeling, K.J.
Author_Institution :
Dept. of Optoelectron., Ulm Univ., Germany
Abstract :
We introduce a new layout for high-bandwidth single-mode selectively oxidized vertical-cavity surface-emitting laser (VCSEL) arrays operating at 980 nm or 850 nm emission wavelength for substrate or epitaxial side emission. Coplanar feeding lines and polyimide passivation are used to reduce electrical parasitics in top-emitting GaAs and bottom-emitting InGaAs VCSELs. In order to enhance fundamental single-mode emission for larger devices of reduced series resistance a surface relief transverse mode filter is employed. Fabricated VCSELs are applied in various interconnect schemes
Keywords :
optical interconnections; oxidation; semiconductor laser arrays; surface emitting lasers; 850 nm; 980 nm; GaAs; InGaAs; VCSEL array; coplanar feed line; parallel high-speed optical interconnect; polyimide passivation; selective oxidation; single mode emission; surface relief transverse mode filter; Gallium arsenide; Indium gallium arsenide; Optical arrays; Passivation; Polyimides; Substrates; Surface emitting lasers; Surface resistance; Surface waves; Vertical cavity surface emitting lasers;
Conference_Titel :
Electronic Components & Technology Conference, 2000. 2000 Proceedings. 50th
Conference_Location :
Las Vegas, NV
Print_ISBN :
0-7803-5908-9
DOI :
10.1109/ECTC.2000.853333
